Spray Coater 3D Resist Coating Device DC110/DC210
Spray cooler developed for MEMS devices and various semiconductor research!
The Spray Coater 3D Resist Coating Device DC110/DC210 is a spray coater developed for MEMS devices and various semiconductor research. With a spray nozzle capable of fine particle generation, it can form a uniform film even on inclined surfaces, trapezoidal shapes, and right-angle vertex areas that are difficult to coat with conventional spinners. It also enables resist embedding coating in cavity, via hole, and trench structures, which are challenging to achieve with spinners. The coating thickness can range from spinner-class thin films to ultra-thick films. It supports ultra-thick resists such as the AZ Electronic Materials AZ-P4000 series, MicroChem SU8, KMPR series, as well as benzocyclobutene resin (BCB) and various polymers. Additionally, it can apply high-viscosity liquids (depending on the liquid properties). By applying only to the necessary minimum area, there is no waste of liquid as seen in spin coating. The nozzle-moving multi-pass scanning method accommodates large samples. For more details, please contact us or refer to the catalog.
- Company：ナノテック
- Price：Other
